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2006
Conference Paper
Titel
High-rate electron beam deposition - the possibility of high-quality coating of large areas
Abstract
High-rate electron beam deposition is one of the most effective PVD technologies. The very high productivity of this technol. makes it predestined to coat large areas like metal strips and webs. Some features such as very dense and pure layers, different layers on both sides of the strip, wide range of possible layer material and environmental friendly processing enable the technol. to overcome limitations known from electroplating. Well adapted powerful plasma activation processes developed at FEP extend the possibilities of electron beam deposition addnl. Considering coating of copper as an example the paper will present new developments at FEP.
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