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Influence of bandwidth and dynamic range on thickness determination using terahertz time-domain spectroscopy

: Liebelt, L.; Weber, S.; Klier, J.; Pfeiffer, T.; Molter, D.; Ellrich, F.; Freymann, G. von


Institute of Electrical and Electronics Engineers -IEEE-:
44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 : 1-6 September 2019, Paris, France
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-5386-8285-2
ISBN: 978-1-5386-8286-9
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) <44, 2019, Paris>
Conference Paper
Fraunhofer ITWM ()
nondestructive layer-thickness determination; terahertz time-domain spectroscopy

Terahertz time-domain spectroscopy (TDS) is a very attractive technique in the field of nondestructive layer-thickness determination. The characteristics of the generated terahertz pulses - bandwidth and dynamic range - have direct influence on the thickness-determination performance. The resulting effects are investigated in this contribution.