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High-reflectivity HfO2/SiO2 ultraviolet mirrors

: Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C.


Applied optics 41 (2002), No.16, pp.3256-3261
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high- energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of ~99% near 250 nm are reported.