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The virtual interferometer - A tool for the systematic assessment of error-sources in interferometry

: Pfeifer, T.; Bai, A.


CIRP Annals. Manufacturing Technology 51 (2002), No.1, pp.455-458
ISSN: 0007-8506
Journal Article
Fraunhofer IPT ()

The knowledge of measurement uncertainties is essential for the proper assessment of product-quality, for controlling production processes and to ensure comparability with other types of metrological instruments. However, the assessment of measurement uncertainties becomes more complicated when high-precision metrology is considered. In this paper a procedure for the assessment of the measurement uncertainty of interferometers with the help of a virtual instrument, the so-called 'Virtual Interferometer', will be presented. In conjunction with finite element analysis the Virtual Interferometer allows to determine the influence of error-sources that cannot be modelled with commercial ray tracing software, like e.g. the thermal expansion of optical components.