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2019
Conference Paper
Title

CMUT with mechanically coupled plate actuators - Linearized electrostatic modeling

Abstract
This paper derives an analytical model of the electrostatic transduction of a capacitive micromachined ultrasonic transducer (CMUT) with mechanically coupled plate actuators. The mass of the coupling geometry significantly affects the dynamic deflection shape of the plate actuators. As the electrostatic transduction of a CMUT depends on the distance between both electrodes of these capacitive systems, the static and dynamic deflection shapes are taken into account for the small signal electrostatic behavior. The analysis of the electrostatic lumped elements, varying with the bias voltage, reveals a dependence on the deflection shape. A comparison with finite element simulations shows good agreement with the analytical model.
Author(s)
Krenkel, Marcel  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Koch, Sandro  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Kupnik, M.
Mainwork
IEEE International Ultrasonics Symposium, IUS 2019  
Conference
International Ultrasonics Symposium (IUS) 2019  
DOI
10.1109/ULTSYM.2019.8925938
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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