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Combining Brillouin spectroscopy and laser-SAW technique for elastic property characterization of thick DLC films

: Berezina, S.; Zinin, P.V.; Schneider, D.; Fei, D.; Rebinsky, D.A.


Ultrasonics 43 (2004), No.2, pp.87-93
ISSN: 0041-624X
Journal Article
Fraunhofer IWS ()

Surface Brillouin spectroscopy (SBS) has been widely used for elastic property characterization of thin films. For films thicker than 500 nm, however, the wavelength of surface acoustic wave in the frequency range available for SBS is smaller than film thickness, and the SBS measures only the Rayleigh wave of the film. The laser-SAW technique, on the other hand, measures only the low-frequency portion of the surface acoustic wave dispersion and can estimate only one elastic modulus of the film (typically Young's modulus). In this work, we have combined the two methods to determine both Young's modulus and Poisson's ratio of a diamond-like carbon (DLC) film. It was found that reasonable estimates can be obtained for the longitudinal wave velocity, shear wave velocity, and Young's modulus of the film. The Poisson's ratio, however, still has a relatively large measurement error.