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Protective diamond-like carbon coatings for future optical storage disks

: Piazza, F.; Grambole, D.; Schneider, D.; Casiraghi, C.; Ferrari, A.C.; Robertson, J.


Robertson, J.:
Diamond 2004, the 15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide. Proceedings : Riva del Garda, Italy, September 12 - 17, 2004
Amsterdam: Elsevier, 2005 (Diamond and related materials 14.2005, Nr.3/7)
ISSN: 0925-9635
European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide (Diamond) <15, 2004, Riva del Garda>
Conference Paper, Journal Article
Fraunhofer IWS ()

Diamond-like carbon (DLC) is a promising protective coating for future optical storage technologies. The requirements place conflicting constraints on the nature of the DLC. It must be transparent at 400 nm, hard and wear-resistant, uniform, pinhole-free, have a low stress and be deposited at high rate without a high heat load on a plastic substrate. In order to optimise the films under these constraints, we have studied in detail the band gap, stress, density and Young's modulus of hydrogenated amorphous carbon (a-C:H) films deposited by plasma enhanced chemical vapour deposition using a large area electron cyclotron wave resonance source of 14 in. diameter and a variety of hydrocarbon gas sources. We have been able to produce wear-resistant carbon coatings with a high transparency at 400 nm without damaging the plastic disks. We also show that for these films the refractive index can be used as a rapid empirical means of property correlation.