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A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

: Gu-Stoppel, S.; Lisec, T.; Fichtner, S.; Funck, N.; Eisermann, C.; Lofink, F.; Wagner, B.; Müller-Groeling, A.


Piyawattanametha, Wibool (Hrsg.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XVIII : 2-4 February 2019, San Francisco, California, United States
Bellingham, WA: SPIE, 2019 (Proceedings of SPIE 10931)
ISBN: 978-1-5106-2504-4
ISBN: 978-1-5106-2505-1
Art. 1093102, 9 pp.
Conference "MOEMS and Miniaturized Systems" <18, 2019, San Francisco/Calif.>
Conference "Optoelectronics, Photonic Materials and Devices" <2019, San Francisco/Calif.>
Conference Paper
Fraunhofer ISIT ()

This paper presents a new type of piezoelectric quasi-static mirror, which utilizes a three-level-construction comprising a mirror plate (diameter = 0.8 mm), a pillar and four actuators hidden beneath the mirror plate, reducing the chip size to 1.3 mm2 . Special folded springs connecting the pillar and actuators are applied to reduce the mechanical non-linearity. Moreover, the newly developed piezoelectric material AlScN delivers large force enabling a mechanical tilting angle of ±12.5° at 150 VDC, as well as benefits like great linearity, repeatability and long-term stability. No angle change larger than 0.02° was observed during 100 on-and-off switching circles with 5 s intervals under 100 VDC. Long-term test over 76 hours under 100 VDC has shown maximum 0.1°shift. More precise measurements are ongoing. Based on the great linearity a simple closed-loop-control has also been developed and more results will be presented in the near future.