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A spectral vibration detection system based on tunable micromechanical resonators

: Scheibner, D.; Mehner, J.; Reuter, D.; Gessner, T.; Dötzel, W.


French, P.J.:
Eurosensors XVIII, 18th European Conference on Solid-State Transducers 2004 : Rome, Italy, 13 - 15 September 2004; Eurosensors XVIII Conference
Amsterdam: Elsevier, 2005 (Sensors and actuators. A, Physical 123/124.2005)
European Conference on Solid-State Transducers (Eurosensors) <18, 2004, Rome>
Conference Paper, Journal Article
Fraunhofer IZM ()
Fraunhofer ENAS ()

We present a frequency selective vibration detection system based on tunable micromechanical resonators for the frequency range 1-10 kHz. The Single Crystal Reactive Etching and Metallization (SCREAM)-fabricated sensor structure consists of an array of eight resonators with stepped base frequencies between 1,1 and 10.2 kHz. The resonators provide a resonance frequency tuning capability by electrostatic forces to set the detection frequency to the desired value. Experimental results of the fabricated resonator arrays are presented. A maximum tuning voltage of 35 V is required for continuous resonance frequency tuning from I to 10 kHz. The amplitude range of the resonators amounts to 10 mu m. Over the whole amplitude range, a maximum resonance frequency shift of 0.7% was measured. An increase of ambient temperature from 30 to 150 degrees C results in a small resonance shift of 0.5% and to an increase of resonance peak bandwidth of 23%. The sensor structure is part of a vibration detection system, which is completed with analogue and digital circuitry. Test measurements with the system demonstrate its functionality and applicability in an industrial environment.