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Table-top nanoscale coherent imaging with XUV light

: Rothhardt, J.; Tadesse, G.K.; Eschen, W.; Limpert, J.

Fulltext ()

Journal of optics 20 (2018), No.11, Art. 113001, 16 pp.
ISSN: 2040-8978
ISSN: 2040-8986
Journal Article, Electronic Publication
Fraunhofer IOF ()

Modern laser-based XUV light sources provide very high photon fluxes which have previously only been available at large scale facilities. This allows high-performance XUV nanoscale imaging to be implemented in a table-top manner, and thus qualifies XUV imaging as a novel imaging technique complementing electron and visible-light microscopy. This article presents the current state-of-the-art in table-top XUV light sources and matched coherent imaging schemes. Selected experiments demonstrate the unique capabilities of XUV imaging—namely, nanoscale (sub-20 nm) resolution, single shot imaging, imaging of extended samples and 3D imaging of μm-sized objects. In addition, future prospects will be discussed, including scaling to few-nm resolution, extension to the soft x-ray spectral region, chemically-specific imaging at absorption edges and time-resolved imaging on femtosecond time-scales.