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Selective Induction Heating of Metallic Microstructures for Wafer-Level MEMS Packaging

 
: Froehlich, A.; Hofmann, C.; Rochala, P.; Kimme, J.; Kroll, M.; Kraeusel, V.

Univ. of Padua:
HES-19, International Conference on Heating by Electromagnetic Sources : Induction, dielectric and microwaves, conduction & electromagnetic processing; Padua, May 22-24, 2019
Padova: SGE, 2019
ISBN: 978-88-89884-35-5
pp.377-382
International Conference on Heating by Electromagnetic Sources (HES) <2019, Padova>
English
Conference Paper
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/documents/N-565796.html