Abstract
The integration of a diagnostic tool in the form of a conditon based monitoring in a machine of highest accuracy was subject of this diploma thesis. Starting from a fault analysis critical parameters, witch can be gathered by the internal measurement system of the machine, were defined in coorporation with the machine manufacturer. By the developed software it is now possible to detect and interpret leakages of pressure and faults in the aerostatic supported axes. The user gets details to the actual machine condition.