Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Micro-transfer-printing for heterogeneous integration

 
: Corbett, B.; Li, Z.; Bühler, K.; Naumann, F.; Krieger, U.; Wicht, S.; Bower, C.A.

:

6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019. Proceedings : 21-25 May 2019, Kanazawa, Ishikawa, Japan
Piscataway, NJ: IEEE, 2019
ISBN: 978-4-904743-07-2
ISBN: 978-1-72810-387-7
pp.34
International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) <6, 2019, Kanazawa>
English
Conference Paper
Fraunhofer IMWS ()

Abstract
Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.

: http://publica.fraunhofer.de/documents/N-565591.html