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Publisher's Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)]
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2019
Journal Article
Titel
Publisher's Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)]
Author(s)
Weiße, J.
Hauck, M.
Krieger, M.
Bauer, A.J.
Erlbacher, T.
Zeitschrift
AIP Advances
DOI
10.1063/1.5118666
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB