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RF-plasma deposition of SiOx and a-C:H as barrier coatings on polymers

 
: Hegemann, D.; Schütz, U.; Oehr, C.

:

D'Agostino, R. ; International Union of Pure and Applied Chemistry -IUPAC-; International Plasma Chemistry Society -IPCS-:
Plasma processes and polymers : Comprehensive collection of 37 peer-reviewed articles presented as contributions at ISPC-16, 16th International Symposium on Plasma Chemistry, Taormina/Italy, June 22 - 27, 2003
Weinheim: Wiley-VCH, 2005
ISBN: 3-527-40487-2
pp.23-37
International Symposium on Plasma Chemistry (ISPC) <16, 2003, Taormina>
English
Conference Paper
Fraunhofer IGB ()

: http://publica.fraunhofer.de/documents/N-56276.html