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Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers

 
: Paskaleva, A.; Lemberger, M.; Bauer, A.J.

:

Institute of Electrical and Electronics Engineers -IEEE-:
2006 25th International Conference on Microelectronics. Vol. 2 : Serbia and Montenegro, 14 - 17 May 2006
Piscataway, NJ: IEEE, 2006
ISBN: 1-424-40116-X
pp.551-554
International Conference on Microelectronics (MIEL) <25, 2006, Belgrade>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-56201.html