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Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers
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2006
Conference Paper
Titel
Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers
Author(s)
Paskaleva, A.
Lemberger, M.
Bauer, A.J.
Hauptwerk
2006 25th International Conference on Microelectronics. Vol. 2
Konferenz
International Conference on Microelectronics (MIEL) 2006
DOI
10.1109/ICMEL.2006.1651025
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB