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Comparison of Laser Pulse Duration for the Spatially Resolved Measurement of Coating Thickness with Laser-Induced Breakdown Spectroscopy

: Basler, Carl; Brandenburg, Albrecht; Michalik, Katarzyna; Mory, David

Fulltext ()

Sensors. Online journal 19 (2019), No.19, Art. 4133, 10 pp.
ISSN: 1424-8220
ISSN: 1424-8239
ISSN: 1424-3210
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
KMU-innovativ; 02P16K072; DSA LIPS
Produktionsintegrierte Qualifizierung dünner Beschichtungen
Journal Article, Electronic Publication
Fraunhofer IPM ()
laser-induced breakdown spectroscopy; LIBS; coating thickness; ultrashort laser pulses; industrial application

In this study, a method is presented to measure precisely the thickness of coated components based on laser-induced breakdown spectroscopy (LIBS). The thickness is determined by repetitively ablating the coating with ultrashort laser pulses, monitoring the spectrum of the generated plasma and calculating the coating thickness from the specific plasma signal in comparison to a reference measurement. We compare different pulse durations of the laser (290 fs, 10 ps, 6 ns) to extend the material analysis capabilities of LIBS to a real thickness measurement tool. The method is designed for production processes with known coating materials. Here, we show this for a nickel coating and a tungsten carbide coating on a copper sample with thicknesses from 5–30 µm.