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Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
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2006
Conference Paper
Titel
Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Author(s)
Krellmann, M.
Friedrichs, M.
Dauderstädt, U.
Wagner, M.
Lakner, H.
Hauptwerk
Reliability, packaging, testing, and characterization of MEMS/MOEMS V
Konferenz
Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS 2006
DOI
10.1117/12.647358
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS