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Robust and Flexible Thermal Sensor Using the 3-Omega-Method to Investigate Thermal Properties of Fluids

: Bernhardsgrütter, Ralf E.; Hepp, Christoph J.; Schmitt, Katrin; Jägle, Martin; Pernau, Hans-Fridtjof; Wöllenstein, Jürgen


Institute of Electrical and Electronics Engineers -IEEE-:
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, TRANSDUCERS & EUROSENSORS 2019 : 23-27 June 2019, Berlin, Germany
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-5386-8104-6
ISBN: 978-1-5386-8105-3
ISBN: 978-1-7281-2007-2
International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) <20, 2019, Berlin>
European Conference on Solid-State Transducers (Eurosensors) <33, 2019, Berlin>
Conference Paper
Fraunhofer IPM ()
3-Omega Method; Thermal Sensor; thermal property; Platinum Thin Film Sensor; multilayer structure

This paper presents a platinum thin film sensor able to investigate the thermal properties of a fluid whereas the sensing element is protected against corrosion by an intermediate stainless-steel wall. Progress claims include: 1) the 3-omega method is applied to investigate fluids which are not directly adjacent to the sensitive layer, 2) the 3-omega-method is applied for a meander structure, 3) a theoretical model is developed and agrees well with the experiment. These findings can have a key role for future stand-alone sensors measuring thermal parameters, or for sensors which combine several measurement principles, e.g. the 3-omega method for thermal parameter detection and the thermal flow meters for flow speed measurements.