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Multiwavelength holography: Height measurements despite axial motion of several wavelengths during exposure

: Schiller, Annelie; Beckmann, Tobias; Fratz, Markus; Bertz, Alexander; Carl, Daniel; Buse, Karsten


Applied optics 58 (2019), No.34, pp.G48-G51
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Bundesministerium für Bildung und Forschung BMBF (Deutschland)
13N14009; HoloMotion
Dynamisch-holographisches. Messverfahren zur Erfassung metallischer Freiformflächen
Journal Article
Fraunhofer IPM ()
optical measurement; height measurement; light scattering; Digital Holographic Imaging; 3D measurement; phase noise

Interferometric measurements of rotating objects face an axial motion component if the optical axis of the measurement system is not pointing towards the axis of rotation. In a typical interferometer, axial motion of half a wavelength reduces the interference contrast to zero. Our setup compensates for this axial component by an adapted variation of the reference path length during exposure utilizing a piezoelectric actuator. We present off-center measurements on a cylinder, rotating with different angular velocities. The repeatability of these measurements is dominated by motion blur, which demonstrates that the compensation of the axial motion works accurately.