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Metasurface-based patterned wave plates for VIS applications

: Stock, C.; Siefke, T.; Zeitner, U.


Journal of the Optical Society of America. B, Optical physics 36 (2019), No.5, pp.D97-D102
ISSN: 0740-3224
ISSN: 1520-8540
Journal Article
Fraunhofer IOF ()

We present the design and fabrication of metasurface-type patterned wave plates for VIS applications. The metasurface consists of a grating structure with periods much smaller than the addressed wavelength. By using character projection e-beam lithography for the fabrication, various shapes, orientations, sizes, and patterns can be realized within affordable exposure times. For the first demonstration, a pattern with different orientations of the grating ridges of quarter-wave plates for 532 nm wavelength is presented.