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Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

: Mikulik, P.; Jergel, M.; Baumbach, T.; Majkova, E.; Pincik, E.


Journal of Physics. D. Applied Physics 34 (2001), No.10, pp.A188-A192
ISSN: 0022-3727
ISSN: 1361-6463
Journal Article
Fraunhofer IZFP ()
multilayer; reflectivity measurement; x-ray

Structural characterization of a fully etched amorpous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theroy for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.