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Quantitative oxide charge determination by photocurrent analysis

 
: Rommel, M.; Bauer, A.J.; Ryssel, H.

:
Postprint urn:nbn:de:0011-n-555323 (184 KByte PDF)
MD5 Fingerprint: c7513d8210b29bb14a2cc6db385e157e
Created on: 26.8.2010


Microelectronics reliability 47 (2007), pp.673-677
ISSN: 0026-2714
English
Journal Article, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-55532.html