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A test system for micromirror arrays

: Tanneberger, T.

Veeco Instruments GmbH; Max-Planck-Institut für Biophysikalische Chemie, Göttingen:
Veeco Usermeeting 2001. Abstracts : vom 10.-11. April 2001 im Max-Planck-Institut Göttingen
Göttingen, 2001
Veeco Usermeeting <7, 2001, Göttingen>
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Mikrospiegel; automatisches testsystem; micromirror; spatial light modulator; Pixeldefekt; Fertigung; test

Over the last few years, high resolution spatial light modulators (SLM), with over 2 million
pixels, each capable of being addressed individually for optical applications have been developed
at IMS Dresden. SLM. In order to be able to supply a qualified and correspondingly tested
component of the respective technology to industrial partners in the future, it is necessary to
construct an appropriate control and test facility for the SLM. The objective is a fully automatic test stand for the testing of finished components and, in addition, also for measuring tasks in further research and development.