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Transfer of Run-to-Run-Control to Production Control Level in Semiconductor Front-End

 
: Bauer, Dennis; Maier, Florian; Schlereth, Andreas

:
presentation urn:nbn:de:0011-n-5460646 (1.1 MByte PDF)
MD5 Fingerprint: acb8c9ba84776148657dc67309e4c90a
Created on: 22.5.2019


Zenodo. Online resource (2019), 19 Folien
European Advanced Process Control and Manufacturing Conference (APCM) <19, 2019, Villach>
English
Conference Paper, Electronic Publication
Fraunhofer IPA ()
dispatching; Regelkreis; Produktionssteuerung

Abstract
Supply chain disruptions with an unpredictable occurrence such as significant differences between forecasts and actual customer demands are challenging for semiconductor manufacturers. Normally, these events are responded to with a time-consuming mostly manual procedure. This work describes an approach for an automated framework to react faster and with less effort on these unpredictable events. Therefore, an approach based on run-to-run-control has been developed establishing a closed-loop control between supply chain and production control. As a result of this approach, safety stocks can be reduced due to a more accurate cycle time prediction and a reduced number of false alarms regarding supply chain disruptions.

: http://publica.fraunhofer.de/documents/N-546064.html