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Maskless origination of microstructures with optical functions on large areas

 
: Mick, J.; Gombert, A.; Bläsi, B.; Müller, C.

:

Mackay, R.S. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Emerging lithographic technologies IX. Vol.2 : 1 - 3 March 2005, San Jose, California, USA
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5751)
ISBN: 0-8194-5731-0
pp.1003-1014
Conference "Emerging Lithographic Technologies" <9, 2005, San Jose/Calif.>
English
Conference Paper
Fraunhofer ISE ()

: http://publica.fraunhofer.de/documents/N-54497.html