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  4. 3D applicable ALD film for humidity detection
 
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2019
Conference Paper
Title

3D applicable ALD film for humidity detection

Abstract
In this work, ALD films are developed by alternately applying semiconducting ZnO grains and dielectric Al2O3 grains which result in homogeneous composites with humiditysensitive properties. Various films, which differ in the grain size ratio of ZnO to Al2O3, are tested with 2D sensor structures. IV-t measurements during interaction of the films with applied water droplets reveal current and resistance changes of up to five orders of magnitude. 3D applicability of these humidity-sensitive films is proven by cross-sectional SEM images of an all-around coated silicon chip.
Author(s)
Dogan, Özgü
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Görtz, Michael  
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Mokwa, Wilfried
RWTH Aachen / IWE 1
Vogt, Holger
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Mainwork
Smart Systems Integration 2019  
Conference
Smart Systems Integration Conference (SSI) 2019  
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2019  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • ALD composite

  • humidity detection

  • humidity sensitive

  • CMOS compatible

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