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2017
Conference Paper
Titel
Failure analysis and defect inspection of electronic devices by high resolution cathodoluminescence
Abstract
Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over large field of view with a spatial resolution close to that of a scanning electron microscope (SEM). Correlation of surface morphology (SE contrast) with spectrally resolved and highly material .composition sensitive CL emission opens a new pathway in non-destructive failure and defect analysis at the nanometer scale. Here wè present application of a modern CL microscope in defect and homogeneity metrology, as well as failure analysis in semiconducting electronic materials.