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Inkjet printing of patterned nanocarbon absorber layers for pyroelectric infrared detectors

 
: Zeiner, C.; Polomoshnov, M.; Müller, M.; Sowade, E.; Günther, A.; Neumann, N.; Seifert, T.; Blaudeck, T.; Hermann, S.; Baumann, R.R.; Wiemer, M.; Otto, T.

Otto, T. ; Messe Frankfurt; Fraunhofer-Institut für Elektronische Nanosysteme -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Smart Systems Integration 2018. International Conference and Exhibition on Integration Issues of Miniaturized Systems : Dresden, Germany, 11 - 12 April 2018
Auerbach /Vogtl.: Verlag Wissenschaftliche Scripten, 2018
ISBN: 978-3-95735-082-4
ISBN: 3-95735-082-4
ISBN: 978-1-5108-6771-0 (Ausgabe bei Curran)
pp.39-45
International Conference and Exhibition on Integration Issues of Miniaturized Systems <2018, Dresden>
Smart Systems Integration Conference (SSI) <2018, Dresden>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
Several strategies to use inkjet-printing as a mean to generate patterned absorber layers on LiTaO3 substrates for pyroelectric infrared (IR) detectors are reported. In detail, an alternative path to State-of-the-art technolgies like unpatterned spray coating or high-temperature chemical vapor deposition is introduced in order to deposite absorbing black layers within the pyroelectric detector manufacturing process. Experimental results obtained with commercial inkjet inks and usage of alternative pigments such as single-walled and multi-walled carbon nanotubes (SWCNTs, MWCNTs) are reported.

: http://publica.fraunhofer.de/documents/N-531652.html