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Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures

Presentation held at Wodim 2018, 20th Workshop on Dielectrics in Microelectronics, 11 - 14 June 2018, Berlin, Germany
 
: Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke

2018, 2 pp.
Workshop on Dielectrics in Microelectronics (WoDiM) <20, 2018, Berlin>
English
Presentation
Fraunhofer IPMS ()
Fraunhofer IME ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-531558.html