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Subnanometer calibration of diffractive micromirror arrays

Presentation held at European Optical Society Biennial Meeting, EOSAM 2018, 8 - 12 October 2018, Delft, Netherlands
 
: Sicker, Cornelius; Heber, Jörg; Berndt, Dirk

2018, 22 Folien
European Optical Society (EOSAM Biennial Meeting) <2018, Delft>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-531394.html