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Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

 
: Huang, J.; Wen, Q.; Nie, Q.; Chang, F.; Zhou, Y.; Wen, Z.

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Fulltext ()

Micromachines 9 (2018), No.10, Art.478, 9 pp.
ISSN: 2072-666X
English
Journal Article, Electronic Publication
Fraunhofer ENAS ()

Abstract
This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm3, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor.

: http://publica.fraunhofer.de/documents/N-524289.html