Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices

Presentation held at at 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018, 11-15 November 2018, Kaohsiung, Taiwan
 
: Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald

2018, 4 pp.
International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS) <22, 2018, Kaohsiung>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

Abstract
In this paper the investigation and workarounds of commonly considered challenging effects such as fluidic shortcuts and unwanted effects such as electrolysis of the working fluid, when using in-plane electrostatic beam bending actuators in microfluidic devices are presented. The dynamic behavior of the actuators is investigated via a fluid-structure interaction simulation. In the case of 1 μm clearances above and unterneath the actuator, a shift to shorter times scales of two order of magnitude was found out. A conformal bi-layer coating of 400 nm parylene-C + 60 nm Alumina was found as a proper encapsulation to prevent unwanted effects such as electrolysis.

: http://publica.fraunhofer.de/documents/N-524072.html