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Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices

Presentation held at at 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018, 11-15 November 2018, Kaohsiung, Taiwan
: Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald

2018, 4 pp.
International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS) <22, 2018, Kaohsiung>
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute

In this paper the investigation and workarounds of commonly considered challenging effects such as fluidic shortcuts and unwanted effects such as electrolysis of the working fluid, when using in-plane electrostatic beam bending actuators in microfluidic devices are presented. The dynamic behavior of the actuators is investigated via a fluid-structure interaction simulation. In the case of 1 μm clearances above and unterneath the actuator, a shift to shorter times scales of two order of magnitude was found out. A conformal bi-layer coating of 400 nm parylene-C + 60 nm Alumina was found as a proper encapsulation to prevent unwanted effects such as electrolysis.