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Approach to a machine-integrated measurement device for the interferometric testing of ultraprecise surfaces
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2004
Conference Paper
Titel
Approach to a machine-integrated measurement device for the interferometric testing of ultraprecise surfaces
Author(s)
Pfeifer, Tilo
Dörner, Dirk
Schneefuß, Karsten
Hauptwerk
Photonics in measurement
Konferenz
International Symposium on Photonics in Measurement 2004
Language
English
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