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Piezoresistive diamond-like carbon micro strain gauges

: Peiner, E.; Tibrewala, A.; Lüthje, H.; Bandorf, R.; Biehl, S.; Doering, L.

Sociedade Brasileira de Metrologia:
IMEKO XVIII World Congress and IV Brazilian Congress of Metrology 2006. CD-ROM : September 17 - 22, 2006, Rio de Janeiro, Brazil
Rio de Janeiro: Letra Capital Editoria, 2006
IMEKO World Congress <18, 2006, Rio de Janeiro>
Brazilian Congress of Metrology <4, 2006, Rio de Janeiro>
Conference Paper
Fraunhofer IST ()
diamond like-carbon (DLC); piezoresistive gauge factor; micromachined boss membrane sensor

Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon bossmembrane force sensors. DLC strain gauges were investigated under vertical and horizontal connection as well as longitudinal and transversal orientation at temperatures between RT and 60°C revealing piezoresistive gauge factors typically in the range of 50-90 (a-C:H) and 20-30 (a-C).