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Ductile machining of brittle materials for manufacturing micro-optic components

: Uhlmann, Eckart; Oberschmidt, Dirk; Rolon, D.A.; Kühne, S.; Jagodzinski, M.; Malcher, M.

Billington, D. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018. Proceedings : June 4th-8th June 2018, Venice, IT
Bedford: Euspen, 2018
ISBN: 978-0-9957751-2-1
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) <18, 2018, Venice>
Conference Paper
Fraunhofer IPK ()

Due to the geometry and specification of micro-optic components, these may not be ground or polished, therefore they demand other manufacturing processes such as ultra-precision (UP) machining with defined cutting edge tools. Despite previous studies, the machining of brittle materials remains a challenge for manufacturing those components in UP processes. For example, ductile machining of silicon is extensively studied, however, ductile machining of materials such as Zerodur®, GaP, U.L.E.® and glass is still a challenge to overcome. Therefore, this paper aims at reporting the ductile or part-ductile machining of silicon and Zerodur® pieces in UP processes. Experiments were carried out using UP-shaping and plane turning processes in an UP-machine tool. Moreover, monocrystalline diamond tools were employed. During UP-turning experiments, the process forces were measured. The machining results were obtained by White Light Interferometer (WLI) of the representative mach ined surfaces. In order to complement the experiments, simulations were performed in finite element software to comprehend the influences of the rake angle on ductile machining of those materials. After the UP-shaping experiments, the depth of cut was determined for each of the mentioned materials together with the main influence of each process parameter. Furthermore, a reduction of parameter ranges for UPturning experiments was accomplished. Using Design of Experiments for UP-turning tests, the main influences of process parameters were observed and detailed, together with tool geometry optimization and recommendation for further experiments. The local optimum of process parameters was found as well as the accomplishment of ductile removal during the machining tests. These results and simulation models are going to be further used for a more detailed process description, as analogous tests and optimization of UP processes such as micro-milling.