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Reactive bonding with oxide based reactive multilayers
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2018
Conference Paper
Titel
Reactive bonding with oxide based reactive multilayers
Author(s)
Vogel, Klaus
Roscher, Frank
Wiemer, Maik
Zimmermann, Sven
Otto, Thomas
Hauptwerk
Smart Systems Integration 2018. International Conference and Exhibition on Integration Issues of Miniaturized Systems
Konferenz
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2018
Smart Systems Integration Conference (SSI) 2018
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS