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Ion-beam sputter deposition of x-ray multilayer optics on large areas
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2006
Conference Paper
Titel
Ion-beam sputter deposition of x-ray multilayer optics on large areas
Author(s)
Gawlitza, P.
Braun, S.
Lipfert, S.
Leson, A.
Hauptwerk
Advances in X-ray/EUV optics, components, and applications
Konferenz
Conference "Advances in X-Ray/EUV Optics, Components, and Applications" 2006
DOI
10.1117/12.680618
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS