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Ion-beam sputter deposition of x-ray multilayer optics on large areas

 
: Gawlitza, P.; Braun, S.; Lipfert, S.; Leson, A.

:

Khounsary, A.M. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advances in X-ray/EUV optics, components, and applications : 14 - 16 August 2006, San Diego, California, USA
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6317)
ISBN: 0-8194-6396-5
Paper 63170G
Conference "Advances in X-Ray/EUV Optics, Components, and Applications" <2006, San Diego/Calif.>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/N-52066.html