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Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

: Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.


IEEE Photonics Society; Institute of Electrical and Electronics Engineers -IEEE-:
International Conference on Optical MEMS and Nanophotonics, OMN 2018. Proceedings : Lausanne, Switzerland, 29 July-2 August 2018
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5090-6374-1
ISBN: 978-1-5090-6373-4
ISBN: 978-1-5090-6375-8
International Conference on Optical MEMS and Nanophotonics (OMN) <23, 2018, Lausanne>
Conference Paper
Fraunhofer IPMS ()

We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48μm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.