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Growth of ta-C films

 
: Schultrich, Bernd

:

Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
pp.299-370
English
Book Article
Fraunhofer IWS ()

Abstract
The understanding of the growth of tetrahedrally bonded amorphous carbon is based on the experimentally selected conditions for the preparation of ta-C films: sufficient high kinetic energy of the impinging carbon particles of at least some ten electron-volt and sufficient low temperatures, usually below 150 °C (see Chap. 7).

: http://publica.fraunhofer.de/documents/N-519480.html