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Hydrogenated amorphous carbon films (a-C:H)

: Schultrich, Bernd


Schultrich, Bernd:
Tetrahedrally Bonded Amorphous Carbon Films I : Basics, Structure and Preparation
Berlin: Springer, 2018 (Springer series in materials science 263)
ISBN: 978-3-662-55925-3 (Print)
ISBN: 978-3-662-55927-7 (Online)
DOI: 10.1007/978-3-662-55927-7
Book Article
Fraunhofer IWS ()

The deposition of hydrogenated amorphous carbon films may be considered as an extension of the conditions beyond the preparation of nanocrystalline diamond structures without the limitations of the crystalline diamond growth. Due to the abolition of crystalline perfection, lower substrate temperatures, higher carbon concentrations in the gas atmosphere and an intensified ion bombardment of the growing film are tolerated.