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Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation

: Stoppel, F.; Niekiel, F.; Giese, T.; Gu-Stoppel, S.; Männchen, A.; Nowak, J.; Beer, D.; Wagner, B.

Audio Engineering Society -AES-:
143rd Audio Engineering Society International Convention 2017 : October 18-21, 2017, New York, NY, USA
Red Hook, NY: Curran, 2018
ISBN: 978-1-5108-7070-3
Audio Engineering Society (AES International Convention) <143, 2017, New York/NY>
Conference Paper
Fraunhofer ISIT ()

In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.