Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

In situ and ex situ spectrophotometric characterization of single- and multilayer-coatings II: Experimental technique and application examples

: Wilbrandt, S.; Stenzel, O.


Stenzel, O.:
Optical characterization of thin solid films
Cham: Springer International Publishing, 2018 (Springer Series in Surface Sciences 64)
ISBN: 978-3-319-75324-9 (Print)
ISBN: 978-3-319-75325-6 (Online)
ISBN: 3-319-75324-X
Bilateral Workshop on Optical Coating Characterization <2016, Brno>
Conference Paper
Fraunhofer IOF ()

In the previous chapter, the theoretical background for characterization of single layer and multilayer coatings has been outlined. In this chapter, important aspects for the underlying experimental techniques will presented. Furthermore, we demonstrate the application of different dispersion models for characterization of uncoated substrates, single layer coatings of dielectrics, semiconductors, metals and organic coatings. Thereby, the focus has been set to the β do model. Finally, the interplay of in situ and ex situ spectroscopy will be demonstrated for a multilayer antireflection coating (V-coating).