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In situ and ex situ spectrophotometric characterization of single- and multilayer-coatings II: Experimental technique and application examples

 
: Wilbrandt, S.; Stenzel, O.

:

Stenzel, O.:
Optical characterization of thin solid films
Cham: Springer International Publishing, 2018 (Springer Series in Surface Sciences 64)
ISBN: 978-3-319-75324-9 (Print)
ISBN: 978-3-319-75325-6 (Online)
ISBN: 3-319-75324-X
pp.203-232
Bilateral Workshop on Optical Coating Characterization <2016, Brno>
English
Conference Paper
Fraunhofer IOF ()

Abstract
In the previous chapter, the theoretical background for characterization of single layer and multilayer coatings has been outlined. In this chapter, important aspects for the underlying experimental techniques will presented. Furthermore, we demonstrate the application of different dispersion models for characterization of uncoated substrates, single layer coatings of dielectrics, semiconductors, metals and organic coatings. Thereby, the focus has been set to the β do model. Finally, the interplay of in situ and ex situ spectroscopy will be demonstrated for a multilayer antireflection coating (V-coating).

: http://publica.fraunhofer.de/documents/N-516042.html