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Introduction

 
: Stenzel, O.; Ohlidal, M.

:

Stenzel, O.:
Optical characterization of thin solid films
Cham: Springer International Publishing, 2018 (Springer Series in Surface Sciences 64)
ISBN: 978-3-319-75324-9 (Print)
ISBN: 978-3-319-75325-6 (Online)
ISBN: 3-319-75324-X
pp.3-10
Bilateral Workshop on Optical Coating Characterization <2016, Brno>
English
Conference Paper
Fraunhofer IOF ()

Abstract
Optical thin film characterization represents the total of all theoretical and experimental activities, which pursue determination of various thin film construction parameters. The purpose of optical characterization is usually in the determination of film thickness, refractive index and extinction coefficient, porosity, surface roughness, film stoichiometry, film density and the like.

: http://publica.fraunhofer.de/documents/N-515974.html