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MEMS integration on foundry-fabricated CMOS backplanes
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2018
Book Article
Titel
MEMS integration on foundry-fabricated CMOS backplanes
Author(s)
Hohle, Christoph
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Schulze, Matthias
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Hauptwerk
Microsystems Technology in Germany 2018
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English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS