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Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation

Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
 
: Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton

:
Poster urn:nbn:de:0011-n-5151343 (1.5 MByte PDF)
MD5 Fingerprint: a22f52f808d82d3ce140a897b3d5a145
Created on: 12.10.2018


2018, 1 Folie
European Conference on Silicon Carbide and Related Materials (ECSCRM) <12, 2018, Birmingham>
English
Poster, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-515134.html