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Characterization of Ti/TiN and TiN conductive layers for high temperature MEMS devices
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2005
Conference Paper
Titel
Characterization of Ti/TiN and TiN conductive layers for high temperature MEMS devices
Author(s)
Lange, P.
Ohlsen, B.
Puls, S.
Syre, J.
Hauptwerk
Micro- and nanosystems - Materials and devices
Konferenz
Symposium J "Micro- and Nanosystems - Materials and Devices" 2005
Materials Research Society (Spring Meeting) 2005
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT