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High temperature stability of Ti/TiN and TiN heaters on bulk micromachined membranes
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2005
Conference Paper
Titel
High temperature stability of Ti/TiN and TiN heaters on bulk micromachined membranes
Author(s)
Lange, P.
Puls, S.
Syre, J.
Ohlsen, B.
Hauptwerk
SENSOR 2005. 12th international conference. Proceedings
Konferenz
Sensor-Kongress 2005
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT