Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Proof-of-concept tool development for projection mask-less lithography (PML2)
:
Döring, H.-J.; Elster, T.; Heinitz, J.; Fortagne, O.; Brandstätter, C.; Haugeneder, E.; Eder-Kapl, S.; Lammer, G.; Löschner, H.; Reimer, K.; Eichholz, J.; Saniter, J. | Mackay, R.S. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Emerging lithographic technologies IX. Vol.1 : 1 - 3 March 2005, San Jose, California, USA
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5751)
ISBN: 0-8194-5731-0
pp.355-365 |
| Conference "Emerging Lithographic Technologies" <9, 2005, San Jose/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT ()
Fraunhofer HHI () |