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Combination of soft X-ray microscopy with in-situ mechanical testing to image crack propagation in microchips

 
: Kutukova, Kristina; Liao, Zhongquan; Werner, Stephan; Guttmann, Peter; Standke, Yvonne; Gluch, Jürgen; Schneider, Gerd; Zschech, Ehrenfried

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Microscopy and microanalysis 24 (2018), Supplement S2, pp.438-439
ISSN: 1431-9276
International Conference on X-Ray Microscopy (XRM) <14, 2018, Saskatoon/Canada>
English
Journal Article, Conference Paper
Fraunhofer IKTS ()

: http://publica.fraunhofer.de/documents/N-510057.html